WELCOME TO ISPMM2025

Abstract: Geometric errors of each axis are inherent in each precision machine. Most of the commercial instruments can only measure one kind of error each time. The longer the measurement takes the worse the uncertainty would cause. Techniques of multi-degree-of-freedom (MDOF) measurement systems are thus developed by many researchers to reduce the measuring time. However, most systems are still too complicated to practical applications. This report presents a modular design concept of positioning error, straightness errors and angular errors. Various combinations of selected modules can configure different DOF measurement functions, from 3DOF to 6DOF. Applications in machine tools and measuring machines have shown the capability and flexibility of the developed MDOF laser measuring systems not only in volumetric accuracy assessment, but also in accuracy improvement by error compensation strategies.Biography:  Kuang-Chao Fan received his PhD degree in mechanical engineering from The University of Manchester Institute of Science and Technology in 1984. He worked as a professor at National Taiwan University until 2015. He has been a professor at Dalian University of technology since 2016, and the Cheung Kong Scholar at Hefei University of Technology since 2001. He is a Fellow of SME and ISNM. He has published more than 200 journal papers and 250 conference papers, and holds more than 40 national and international patents. His research interests include precision measurement theory and technology, micro-nano coordinate measuring machine and precision of NC machine tool.

Abstract: Through a very simple fringe denoising example, we investigate that (i) what are the behaviours of the existing machine learning algorithms? (ii) can we propose a wiser machine learning-based solution? (iii) do these algorithms perform better than a traditional algorithm? (iv) Why do they win or lose the comparison? The aim of such investigation is to deepen our understanding of the pros and cons of using machine learning for metrology tasks.Dr Qian Kemao is an Associate Professor in the College of Computing and Data Science (CCDS) at Nanyang Technological University (NTU). He got his BE, ME and PhD degrees from University of Science and Technology of China (USTC). His research interests include optical metrology, image processing, parallel computing, and computer vision. He co-chaired icOPEN and COME conferences for several times. 

Abstract: Precision dimensional metrology, or simply dimensional metrology, is one of the cornerstones to support science and technology. It is a discipline of measurement science and technology for geometric quantities derived from length and angle. Such a measurement is particularly important for precision manufacturing industries including semiconductor manufacturing. Optical sensors are powerful tools for dimensional metrology. Noncontact, fast, and sensitive are some of the important features of optical sensors. This keynote presents optical sensors based on ultrashort pulse laser and optical frequency comb. An insight is given into the fundamental mathematics and physics behind the generation of ultrashort optical pulses by mode-locked lasers, followed by an analysis and comparison of the characteristics between different types of such lasers, from the point of view of applications in dimensional metrology. Measurement technologies utilizing ultrashort pulses as time ruler and nonlinear optics generator in time domain, frequency ruler and white light laser in frequency domain, as well as applications in standards and traceability, are then categorized and presented. Future challenges and developing trends are also discussed.Biography: Wei Gao received his Bachelor of Precision Instrumentation from Shanghai Jiao Tong University, China, in 1986, followed by MSc and Ph. D from Tohoku University, Japan, in 1991 and 1994, respectively. He is currently a professor in the Department of Finemechanics of Tohoku University. His research interests lie primarily in the field of precision engineering, specialized in precision metrology and micro/nano-metrology. He and his group have developed a number of surface metrology systems as well as a couple of optical sensor technologies for precision measurement and nanometrology. He is a fellow of the Engineering Academy of Japan (EAJ), the International Academy for Production Engineering (CIRP), the International Society for Nanomanufacturing (ISNM), the Japan Society for Precision Engineering (JSPE) and the Japan Society for Mechanical Engineers (JSME). He served as the Chairman of The Scientific Technical Committee Precision Engineering and Metrology of CIRP from 2015-2018 and a Vice President of JSPE in 2015. He is the author of the books “Precision Nanometrology” (Springer), “Surface metrology for micro- and nanofabrication” (Elsevier), and “Optical metrology for precision engineering” (De Gruyter). He and his group have won nine JSPE Paper Awards. He was awarded the Prize for Science and Technology by the Japanese Government (MEXT) in 2019.

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